Research Catalog

Spectroscopic characterization techniques for semiconductor technology II : January 21-22, 1985, Los Angeles, California

Title
Spectroscopic characterization techniques for semiconductor technology II : January 21-22, 1985, Los Angeles, California / Fred H. Pollak, chairman/editor.
Publication
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1985], ©1985.

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Details

Additional Authors
  • Pollak, Fred H.
  • Society of Photo-optical Instrumentation Engineers.
Description
vi, 169 pages : illustrations; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 524
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 524.
Subject
  • Semiconductors > Testing > Congresses
  • Spectrum analysis > Congresses
Bibliography (note)
  • Includes bibliographies and index.
ISBN
0892525592 (pbk.)
LCCN
85050424
OCLC
  • 12307424
  • ocm12307424
Owning Institutions
Columbia University Libraries