Research Catalog

Ion implantation in semiconductors

Title
Ion implantation in semiconductors / [edited by] D. Stievenard, J.C. Bourgoin.
Publication
Aedermannsdorf, Switzerland ; Brookfield, VT, USA : Trans Tech Publications, [1988], ©1988.

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Holdings

Details

Additional Authors
  • Stievenard, D.
  • Bourgoin, J. (Jacques), 1938-
Description
v, 473 pages : illustrations; 25 cm
Uniform Title
Diffusion and defect data. Pt. B, Solid state phenomena ; v. 1-2.
Subjects
Note
  • "Previously published in Diffusion and defect data, pt. B: Solid state phenomena"--T.p. verso.
  • Running title: Solid state phenomena vol. 1&2 (1988).
Bibliography (note)
  • Includes bibliographical references and index.
Contents
Silicon -- Application to technology -- Compound semiconductors -- Heterostructures -- Hydrogen implantation -- Germanium.
ISBN
0878495754
OCLC
  • 19349284
  • ocm19349284
Owning Institutions
Columbia University Libraries