Research Catalog

Digest of papers 1989, 2nd MicroProcess Conference : July 2-5, 1989, Kobe, Japan

Title
Digest of papers 1989, 2nd MicroProcess Conference : July 2-5, 1989, Kobe, Japan / Sponsored by the Japan Society of Applied Physics in cooperation with American Vacuum Society, IEEE Electron Devices Society.
Author
International Symposium on MicroProcess Conference (2nd : 1989 : Kōbe-shi, Japan)
Publication
Bunkyo-ku, Tokyo : Business Center for Academic Societies Japan, [1989], ©1989.

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Details

Additional Authors
  • Ōyō Butsuri Gakkai.
  • American Vacuum Society.
  • IEEE Electron Devices Society.
Description
xvii, 213 pages : illustrations; 28 cm
Subject
  • Semiconductors > Etching > Congresses
  • X-ray lithography > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
493081331X
OCLC
  • 23353008
  • ocm23353008
Owning Institutions
Columbia University Libraries