Research Catalog

Rapid thermal annealing/chemical vapor deposition and integrated processing : symposium held April 25-28, 1989, San Diego, California, U.S.A.

Title
Rapid thermal annealing/chemical vapor deposition and integrated processing : symposium held April 25-28, 1989, San Diego, California, U.S.A. / editors, David Hodul [and others].
Publication
Pittsburgh, Pa. : Materials Research Society, 1989.

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Details

Additional Authors
Hodul, David.
Description
xi, 494 pages : illustrations; 24 cm.
Series Statement
Materials Research Society symposium proceedings ; v. 146
Uniform Title
Materials Research Society symposia proceedings ; v. 146.
Subjects
Bibliography (note)
  • Includes bibliographical references.
ISBN
1558990194
LCCN
89039134
OCLC
  • 20295997
  • ocm20295997
Owning Institutions
Columbia University Libraries