Research Catalog
Semiconductor integrated circuit processing technology
- Title
- Semiconductor integrated circuit processing technology / Walter R. Runyan, Kenneth E. Bean.
- Author
- Runyan, W. R.
- Publication
- Reading, Mass. : Addison-Wesley, [1990], ©1990.
Items in the Library & Off-site
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1 Item
Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Text | Request in advance | TK7874 .R86 1990 | Off-site |
Holdings
Details
- Additional Authors
- Bean, Kenneth E.
- Description
- xviii, 683 pages : illustrations; 24 cm
- Subject
- Bibliography (note)
- Includes bibliographical references and index.
- ISBN
- 0201108313
- LCCN
- 89000320
- OCLC
- 19321670
- ocm19321670
- Owning Institutions
- Columbia University Libraries