Research Catalog

IEEE/SEMI International Semiconductor Manufacturing Science Symposium : theme: "Semiconductor manufacturing," May 22-24, 1989, Hyatt Regency Hotel, Burlingame, CA, USA.

Title
IEEE/SEMI International Semiconductor Manufacturing Science Symposium : theme: "Semiconductor manufacturing," May 22-24, 1989, Hyatt Regency Hotel, Burlingame, CA, USA.
Author
IEEE/SEMI International Semiconductor Manufacturing Science Symposium (1st : 1989 : Burlingame, Calif.)
Publication
New York, NY : Institute of Electrical and Electronics Engineers ; Piscataway, NJ : IEEE Service Center [distributor], [1989], ©1989.

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Holdings

Details

Additional Authors
  • Semiconductor Equipment and Materials Institute.
  • IEEE Components, Hybrids, and Manufacturing Technology Society.
Description
136 pages : illustrations; 28 cm
Alternative Title
Semiconductor manufacturing.
Subjects
Note
  • "IEEE catalog number 89CH2699-7."
  • Cosponsored by IEEE/SEMI and IEEE Components, Hybrids, and Manufacturing Technology Society.
Bibliography (note)
  • Includes bibliographies.
LCCN
88659341
OCLC
  • 20230716
  • ocm20230716
Owning Institutions
Columbia University Libraries