Research Catalog

Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

Title
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films / edited by Steven B. Bibyk [and others] ; Dielectrics and Insulation, and Electronics, and High Temperature Materials Divisions.
Author
Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (1988 : Chicago, Ill.)
Publication
Pennington, NJ : Electrochemical Society, [1989], ©1989.

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Holdings

Details

Additional Authors
  • Bibyk, Steven B.
  • Electrochemical Society. Dielectrics and Insulation Division.
  • Electrochemical Society. Electronics Division.
  • Electrochemical Society. High Temperature Materials Division.
Description
vii, 455 pages : illustrations; 23 cm.
Series Statement
Proceedings (Electrochemical Society) ; v. 89-7
Uniform Title
Proceedings (Electrochemical Society) ; v. 89-7.
Alternative Title
Silicon nitride and silicon dioxide thin insulating films.
Subjects
Bibliography (note)
  • Includes bibliographical references.
LCCN
89083899
OCLC
  • 20155102
  • ocm20155102
Owning Institutions
Columbia University Libraries