Research Catalog
Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions
- Title
- Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood.
- Publication
- Park Ridge, N.J., U.S.A. : Noyes Publications, [1990], ©1990.
Items in the Library & Off-site
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1 Item
Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Text | Request in advance | TA2020 .H37 1989 | Off-site |
Holdings
Details
- Additional Authors
- Description
- xxiii, 523 pages : illustrations; 25 cm
- Subject
- Bibliography (note)
- Includes bibliographical references (p. 509-517) and index.
- ISBN
- 0815512201 :
- LCCN
- 89022834
- OCLC
- 20265048
- ocm20265048
- Owning Institutions
- Columbia University Libraries