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Lithography : main techniques / edited by Stefan Landis.

Title
Lithography : main techniques / edited by Stefan Landis.

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TextUse in library TK7872.M3 L58 2011Off-site

Details

Additional Authors
Landis, Stefan.
Description
xxv, 377 p. : ill.; 25 cm.
Summary
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"--
Subject
  • Microlithography
  • TECHNOLOGY & ENGINEERING / Material Science
ISBN
  • 184821202X (hardback)
  • 9781848212022 (hardback)
LCCN
2010040731
Owning Institutions
Columbia University Libraries