Research Catalog

Tungsten and other refractory metals for VLSI applications II : proceedings of the 1986 workshop held November 12-14, 1986, Palo Alto, California, U.S.A.

Title
Tungsten and other refractory metals for VLSI applications II : proceedings of the 1986 workshop held November 12-14, 1986, Palo Alto, California, U.S.A. / sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley ; editor, Eliot K. Broadbent ; associate editors, Robert S. Blewer [and others].
Publication
Pittsburgh, Pa. : Materials Research Society, [1987], ©1987.

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Details

Additional Authors
  • Broadbent, Eliot K.
  • Blewer, R. S.
  • Materials Research Society.
  • University of California, Berkeley. Continuing Education in Engineering.
  • Workshop on Tungsten and Other Refractory Metals for VLSI Applications (3rd : 1986 : Palo Alto, Calif.)
Description
xvii, 426 pages : illustrations; 24 cm.
Series Statement
Materials Research Society conference proceedings, 0886-7860
Uniform Title
Materials Research Society conference proceedings.
Subjects
Note
  • "Papers presented at the Third Workshop on Tungsten and Other Refractory Metals for VLSI Applications."--Pref.
  • The first workshop was entitled: Workshop on Tungsten for VLSI Applications.
Bibliography (note)
  • Includes bibliographies and indexes.
ISBN
0931837669
LCCN
87143578
OCLC
  • 16278166
  • ocm16278166
Owning Institutions
Columbia University Libraries