Research Catalog

Proceedings of the Symposium on Patterning Science and Technology

Title
Proceedings of the Symposium on Patterning Science and Technology / edited by Robert Gleason, George J. Hefferon, L.K. White ; [sponsored by the] Dielectrics and Insulation and Electronics divisions and Luminescence and Display Materials Group.
Author
International Symposium on Patterning Science and Technology (1st : 1989 : Hollywood, Fla.)
Publication
Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, [1990], ©1990.

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Details

Additional Authors
  • Gleason, Robert W.
  • Hefferon, George J.
  • White, L. K.
  • Electrochemical Society. Dielectrics and Insulation Division.
  • Electrochemical Society. Electronics Division.
  • Electrochemical Society. Luminescence and Display Materials Group.
Description
vii, 248 pages : illustrations; 23 cm.
Series Statement
Proceedings (Electrochemical Society) ; v. 90-1
Uniform Title
Proceedings (Electrochemical Society) ; v. 90-1.
Alternative Title
Patterning science and technology.
Subject
  • Microelectronics > Congresses
  • Microlithography > Congresses
  • Photoresists > Congresses
  • Masks (Electronics) > Congresses
Note
  • Spine title: Patterning science and technology.
  • "The First International Symposium on Patterning Science and Technology was presented at the Fall Meeting of the Electrochemical Society, October 15-20, 1989, in Hollywood, Florida"--P. iii.
Bibliography (note)
  • Includes bibliographical references and indexes.
LCCN
90080468
OCLC
  • 21409932
  • ocm21409932
Owning Institutions
Columbia University Libraries