Research Catalog

Multichamber and in-situ processing of electronic materials : 10-11 October 1989, Santa Clara, California

Title
Multichamber and in-situ processing of electronic materials : 10-11 October 1989, Santa Clara, California / Robert S. Freund, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, Center for Advanced Electronic Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison, SEMATECH.
Publication
Bellingham, Wash., USA : SPIE--The International Society for Optical Engineering, [1990], ©1990.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
How do I pick up this item and when will it be ready?
TextRequest in advance TK7836 .M85 1990gOff-site

Holdings

Details

Additional Authors
  • Freund, Robert S.
  • Society of Photo-optical Instrumentation Engineers.
  • North Carolina State University. Center for Advanced Electronic Materials Processing.
  • University of Wisconsin--Madison. Engineering Research Center for Plasma-Aided Manufacturing.
  • SEMATECH (Organization)
Description
vi, 196 pages : illustrations; 28 cm.
Series Statement
Proceedings / SPIE--the International Society for Optical Engineering ; v. 1188
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 1188.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819402249
LCCN
89043524
OCLC
  • 21370477
  • ocm21370477
Owning Institutions
Columbia University Libraries