Research Catalog

Surface and interface analysis of microelectronic materials processing and growth : 12-13 October 1989, Santa Clara, California

Title
Surface and interface analysis of microelectronic materials processing and growth : 12-13 October 1989, Santa Clara, California / Leonard J. Brillson, Fred H. Pollak, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations: Center for Advanced Electronic Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison, SEMATECH.
Publication
Bellingham, Wash., USA : SPIE--The International Society for Optical Engineering, [1990], ©1990.

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Additional Authors
  • Brillson, L. J.
  • Pollak, Fred H.
  • Society of Photo-optical Instrumentation Engineers.
  • North Carolina State University. Center for Advanced Electronic Materials Processing.
  • University of Wisconsin--Madison. Engineering Research Center for Plasma-Aided Manufacturing.
  • SEMATECH (Organization)
Description
vi, 201 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; vol. 1186
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 1186.
Subject
  • Microelectronics > Materials > Congresses
  • Surfaces (Technology) > Analysis > Congresses
  • Semiconductors > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819402222
LCCN
89043522
OCLC
  • 21282100
  • ocm21282100
Owning Institutions
Columbia University Libraries