Research Catalog
Excimer laser lithography
- Title
- Excimer laser lithography / Kanti Jain.
- Author
- Jain, Kanti, 1948-
- Publication
- Bellingham, Wash., USA : SPIE Optical Engineering Press, [1990], ©1990.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TA1695 .J35 1990 | Off-site |
Holdings
Details
- Description
- x, 212 pages : illustrations; 26 cm
- Subjects
- Bibliography (note)
- Includes bibliographical references (p. 193-207).
- ISBN
- 0819402710 :
- 0819402729 (hard) :
- LCCN
- 89024240
- OCLC
- 20492182
- ocm20492182
- Owning Institutions
- Columbia University Libraries