Research Catalog

Excimer laser lithography

Title
Excimer laser lithography / Kanti Jain.
Author
Jain, Kanti, 1948-
Publication
Bellingham, Wash., USA : SPIE Optical Engineering Press, [1990], ©1990.

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Details

Description
x, 212 pages : illustrations; 26 cm
Subject
  • Excimer lasers > Industrial applications
  • Microlithography
Bibliography (note)
  • Includes bibliographical references (p. 193-207).
ISBN
  • 0819402710 :
  • 0819402729 (hard) :
LCCN
89024240
OCLC
  • 20492182
  • ocm20492182
Owning Institutions
Columbia University Libraries