Research Catalog

Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.

Title
Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A. / editors, Gerald Lucovsky, Dale E. Ibbotson, Dennis W. Hess.
Publication
Pittsburgh, Pa. : Materials Research Society, [1990], ©1990.

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Details

Additional Authors
  • Lucovsky, G. (Gerald), 1935-
  • Ibbotson, Dale E.
  • Hess, Dennis W.
Description
ix, 250 pages : illustrations; 24 cm.
Series Statement
Materials Research Society symposium proceedings ; v. 165
Uniform Title
Materials Research Society symposia proceedings ; v. 165.
Subjects
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
1558990534
LCCN
90006543
OCLC
  • 21974391
  • ocm21974391
Owning Institutions
Columbia University Libraries