Research Catalog

Semiconductor cleaning technology, 1989 : proceedings of the First International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Title
Semiconductor cleaning technology, 1989 : proceedings of the First International Symposium on Cleaning Technology in Semiconductor Device Manufacturing / edited by Jerzy Ruzyllo, Richard E. Novak ; assistant editors, M. Arienzo [and others] ; [sponsored by the] Electronics and Dielectrics and Insulation divisions.
Author
International Symposium on Cleaning Technology in Semiconductor Device Manufacturing (1st : 1989 : Hollywood, Fla.)
Publication
Pennington, NJ (10 South Main St., Pennington 08534-2896) : Electrochemical Society, [1990], ©1990.

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Details

Additional Authors
  • Rużyłło, Jerzy.
  • Novak, Richard E.
  • Electrochemical Society. Electronics Division.
  • Electrochemical Society. Dielectrics and Insulation Division.
Description
x, 399 pages : illustrations; 23 cm.
Series Statement
Proceedings (Electrochemical Society) ; v. 90-9
Uniform Title
Proceedings (Electrochemical Society) ; v. 90-9.
Subject
Note
  • "Held at the Electrochemical Society Fall Meeting in Hollywood, Florida, October 15-20, 1989"--P. iii.
Bibliography (note)
  • Includes bibliographical references and indexes.
LCCN
90081371
OCLC
  • 21562780
  • ocm21562780
Owning Institutions
Columbia University Libraries