Research Catalog

Dry etching for VLSI

Title
Dry etching for VLSI / A.J. van Roosmalen, J.A.G. Baggerman, and S.J.H. Brader.
Author
Roosmalen, A. J. van.
Publication
New York : Plenum Press, [1991], ©1991.

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Details

Additional Authors
  • Baggerman, J. A. G.
  • Brader, S. J. H.
Description
xvii, 237 pages : illustrations; 26 cm.
Series Statement
Updates in applied physics and electrical technology
Uniform Title
Updates in applied physics and electrical technology.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0306438356
LCCN
91007385
OCLC
  • 23142645
  • ocm23142645
Owning Institutions
Columbia University Libraries