Research Catalog
Dry etching for VLSI
- Title
- Dry etching for VLSI / A.J. van Roosmalen, J.A.G. Baggerman, and S.J.H. Brader.
- Author
- Roosmalen, A. J. van.
- Publication
- New York : Plenum Press, [1991], ©1991.
Items in the Library & Off-site
Filter by
1 Item
Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Text | Request in advance | TK7871.85 .R58 1991 | Off-site |
Holdings
Details
- Additional Authors
- Description
- xvii, 237 pages : illustrations; 26 cm.
- Series Statement
- Updates in applied physics and electrical technology
- Uniform Title
- Updates in applied physics and electrical technology.
- Subjects
- Bibliography (note)
- Includes bibliographical references and index.
- ISBN
- 0306438356
- LCCN
- 91007385
- OCLC
- 23142645
- ocm23142645
- Owning Institutions
- Columbia University Libraries