Research Catalog
Proceedings of the Sixth Symposium on Automated Circuits Manufacturing
- Title
- Proceedings of the Sixth Symposium on Automated Circuits Manufacturing / edited by Vaughn E. Akins, Hiroyuki Harada ; assistant editors, Robert Miller, Mihir Parikh.
- Author
- Symposium on Automated Integrated Circuits Manufacturing (6th : 1990 : Seattle, Wash.)
- Publication
- Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, [1991], ©1991.
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Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Text | Request in advance | TK7874 .S884 1990 | Off-site |
Holdings
Details
- Additional Authors
- Description
- vii, 413 pages : illustrations; 23 cm.
- Series Statement
- Proceedings ; v. 91-5
- Uniform Title
- Proceedings (Electrochemical Society) ; v. 91-5.
- Subjects
- Note
- "[Sponsored by] Electronics and Dielectric Science and Technology Divisions."
- Bibliography (note)
- Includes bibliographical references and indexes.
- LCCN
- 91070972
- OCLC
- 507524657
- ocn507524657
- Owning Institutions
- Columbia University Libraries