Research Catalog

Advanced techniques for integrated circuit processing : 1-5 October 1990, Santa Clara, California

Title
Advanced techniques for integrated circuit processing : 1-5 October 1990, Santa Clara, California / James Bondur, Terry R. Turner, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE, the International Society for Optical Enginering, [1991], ©1991.

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Details

Additional Authors
  • Bondur, James.
  • Turner, Terry R.
  • Society of Photo-optical Instrumentation Engineers.
Description
x, 690 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series, 0277-786X ; vol. 1392
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 1392.
Subject
Integrated circuits > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819404616
LCCN
90050808
OCLC
  • 507122977
  • ocn507122977
Owning Institutions
Columbia University Libraries