Research Catalog
10th annual Symposium on Microlithography : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California
- Title
- 10th annual Symposium on Microlithography : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California / sponsored by Bacus International.
- Author
- Symposium on Microlithography (10th : 1990 : Sunnyvale, Calif.)
- Publication
- Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1991], ©1991.
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TR940 .S97 1990g | Off-site |
Holdings
Details
- Additional Authors
- BACUS International (Firm)
- Description
- v, 315 pages : illustrations; 23 cm.
- Series Statement
- SPIE proceedings series ; v. 1496
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 1496.
- Alternative Title
- Tenth annual Symposium on Microlithography.
- Subject
- Bibliography (note)
- Includes bibliographical references and index.
- ISBN
- 0819406058 (pbk.)
- LCCN
- 91006046
- OCLC
- 507136390
- ocn507136390
- Owning Institutions
- Columbia University Libraries