Research Catalog

Proceedings of the Symposium on Advances in Ion Technology, 26 May 1976, Bell Telephone Laboratories, Murray Hill, New Jersey : sponsored by the Greater New York Chapter of the American Vacuum Society : special editor for the proceedings, R. E. Honig.

Title
Proceedings of the Symposium on Advances in Ion Technology, 26 May 1976, Bell Telephone Laboratories, Murray Hill, New Jersey : sponsored by the Greater New York Chapter of the American Vacuum Society : special editor for the proceedings, R. E. Honig.
Author
Symposium on Advances in Ion Technology, Bell Telephone Laboratories, 1976.
Publication
New York : Published for the American Vacuum Society by the American Institute of Physics, 1976.

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TextRequest in advance QC701.7 .S9 1976Off-site

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Details

Additional Authors
  • Honig, R. E.
  • American Vacuum Society. Greater New York Chapter.
Description
p.1002-1046 : ill.; 30 cm.
Alternative Title
Advances in ion technology.
Subject
  • Ions > Congresses
  • Ion implantation > Congresses
  • Sputtering (Physics) > Congresses
Genre/Form
Conference papers and proceedings
Note
  • The Proceedings were also published in the 1976 September/October issued of the Journal of vacuum science and technology, v.13, no.5.
  • These are the invited papers of the seventh annual symposium of the Greater New York Chapter of the American Vacuum Society.
Bibliography (note)
  • Includes bibliographical references.
ISBN
0883182262
LCCN
^^^76029203^
OCLC
2740804
Owning Institutions
Harvard Library