Research Catalog
Papers presented at the European Materials Research Society 1998 Meeting. guest editors: A. Slaoui ... [et al.].
- Title
- Papers presented at the European Materials Research Society 1998 Meeting. Symposium I: Rapid Thermal Processing / guest editors: A. Slaoui ... [et al.].
- Author
- Symposium I on Rapid Thermal Processing (1998 : Strasbourg, France)
- Publication
- Kidlington, Oxford, U.K. : Pergamon, c1999.
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1 Item
Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Text | Request in advance | TK7871.85 .S9535 1998b | Off-site |
Holdings
Details
- Additional Authors
- Description
- p. 170-350 : ill.; 27 cm.
- Series Statement
- Materials science in semiconductor processing, 1369-8001 ; v. 1, no. 3/4
- Uniform Title
- Materials science in semiconductor processing ; v. 1, no. 3/4.
- Alternative Title
- European Materials Research Society 1998 Meeting
- Rapid Thermal Processing
- Subject
- Genre/Form
- Conference papers and proceedings
- Note
- Held in Strasbourg, France.
- Bibliography (note)
- Includes bibliographical references.
- Processing Action (note)
- committed to retain
- OCLC
- 42777785
- SCSB-12941260
- Owning Institutions
- Harvard Library