Research Catalog

Papers presented at the European Materials Research Society 1998 Meeting. guest editors: A. Slaoui ... [et al.].

Title
Papers presented at the European Materials Research Society 1998 Meeting. Symposium I: Rapid Thermal Processing / guest editors: A. Slaoui ... [et al.].
Author
Symposium I on Rapid Thermal Processing (1998 : Strasbourg, France)
Publication
Kidlington, Oxford, U.K. : Pergamon, c1999.

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Details

Additional Authors
  • Slaoui, A.
  • European Materials Research Society. Meeting (1998 : Strasbourg, France)
Description
p. 170-350 : ill.; 27 cm.
Series Statement
Materials science in semiconductor processing, 1369-8001 ; v. 1, no. 3/4
Uniform Title
Materials science in semiconductor processing ; v. 1, no. 3/4.
Alternative Title
  • European Materials Research Society 1998 Meeting
  • Rapid Thermal Processing
Subject
  • Rapid thermal processing > Congresses
  • Integrated circuits > Design and construction > Congresses
  • Semiconductor doping > Congresses
Genre/Form
Conference papers and proceedings
Note
  • Held in Strasbourg, France.
Bibliography (note)
  • Includes bibliographical references.
Processing Action (note)
  • committed to retain
OCLC
  • 42777785
  • SCSB-12941260
Owning Institutions
Harvard Library