Research Catalog

Fabrication of functional devices using soft lithography and uncovering micropatterning / by Tao Deng.

Title
Fabrication of functional devices using soft lithography and uncovering micropatterning / by Tao Deng.
Author
Deng, Tao.
Publication
2001.

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Details

Description
xx, 272 leaves : ill.; 29 cm.
Subject
  • Microfabrication
  • Microlithography
  • Molding (Chemical technology)
Thesis (note)
  • Thesis (Ph.D., Department of Chemistry)--Harvard University, 2001.
Bibliography (note)
  • Includes bibliographical references.
Processing Action (note)
  • committed to retain
Owning Institutions
Harvard Library