Research Catalog

Technology of proximal probe lithography / Christie R.K. Marrian, editor.

Title
Technology of proximal probe lithography / Christie R.K. Marrian, editor.
Publication
Bellingham, Wash. : SPIE Optical Engineering Press, c1993.

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Details

Additional Authors
Marrian, Christie R. K.
Description
xi, 413 p. : ill.; 26 cm.
Series Statement
SPIE institutes for advanced optical technologies ; v. IS 10
Uniform Title
SPIE institutes for advanced optical technologies v. IS 10.
Subject
  • Molecular electronics
  • Lithography, Electron beam
  • Probes (Electronic instruments)
  • Nanotechnology
Bibliography (note)
  • Includes bibliographical references.
Processing Action (note)
  • committed to retain
ISBN
  • 0819412325
  • 0819412333 (softcover)
LCCN
^^^93008684^
OCLC
  • 28215980
  • SCSB-10040428
Owning Institutions
Harvard Library