Research Catalog

Microlithography/molecular imprinting / with contributions by H. Ito, J.D. Marty, M. Mauzak [i.e. Mauzac].

Title
Microlithography/molecular imprinting / with contributions by H. Ito, J.D. Marty, M. Mauzak [i.e. Mauzac].
Author
Ito, Hiroshi, 1946-
Publication
Berlin ; New York : Springer, c2005.

Items in the Library & Off-site

Filter by

1 Item

StatusVol/DateFormatAccessCall NumberItem Location
v.172TextRequest in advance QD281.P6 F6 v.172Off-site

Details

Additional Authors
  • Marty, J. D. (Jean Daniel)
  • Mauzac, M. (Monique)
Description
vi, 276 p. : ill.; 24 cm.
Series Statement
Advances in polymer science, 0065-3195 ; 172
Uniform Title
Advances in polymer science 172.
Subject
  • Lithographie <Halbleitertechnologie>
  • Imprinted polymers
  • Microlithography
  • Molecular imprinting
  • Microlithografie
  • Molecular recognition
  • Photoresist
  • Molekulares Prägen
Note
  • Collect. of texts publ. previously.
Bibliography (note)
  • Includes bibliographical references and indexes.
Processing Action (note)
  • committed to retain
Contents
Molecular imprinting : state of the art and perspectives / J.D. Marty, M. Mauzac -- Chemical amplification resists for microlithography / H. Ito.
ISBN
  • 3540218629 (hd. bd.)
  • 9783540218623 (hd. bd.)
LCCN
^^2004115719
OCLC
  • 55963260
  • SCSB-10179589
Owning Institutions
Harvard Library