Research Catalog
Microfabrication and nanomanufacturing / edited by Mark J. Jackson.
- Title
- Microfabrication and nanomanufacturing / edited by Mark J. Jackson.
- Publication
- Boca Raton, FL : CRC/Taylor & Francis, c2006.
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TK7836 .M523 2006 | Off-site |
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Details
- Additional Authors
- Jackson, Mark J.
- Description
- 401 p. : ill.; 27 cm.
- Subject
- Genre/Form
- Aufsatzsammlung.
- Bibliography (note)
- Includes bibliographical references and index.
- Processing Action (note)
- committed to retain
- Contents
- Chapter 1 Micro- and Nanofabrication / Mark J. Jackson 1 -- Chapter 2 Microfabrication Using X-Ray Lithography / David W.L. Tolfree, Mark J. Jackson 33 -- Chapter 3 Etching, Machining, and Molding High-Aspect Ratio Microstructures / Mark J. Jackson, Grant M. Robinson 59 -- Chapter 4 The Size Effect in Micromachining / Milton C. Shaw, Mark J. Jackson 87 -- Chapter 5 Mechanical Micromachining / Mark J. Jackson, Sam B. McSpadden 111 -- Chapter 6 Precision Micro- and Nanogrinding / Vellore C. Venkatesh, Sudin Izman, Mark J. Jackson 143 -- Chapter 7 CVD Diamond Technology for Microtools, NEMS, and MEMS Applications / Waqar Ahmed, Htet Sein, Mark J. Jackson 187 -- Chapter 8 Laser-Based Micro- and Nanofabrication / Mark J. Jackson, Grant M. Robinson 221 -- Chapter 9 Pulsed Water Drop Micromachining / Mark J. Jackson, Luke J. Hyde 249 -- Chapter 10 Diamond Nanogrinding / Mark J. Jackson, Luke J. Hyde, Grant M. Robinson 277 -- Chapter 11 Nanometric Machining: Theory, Methods, and Implementation / Kai Cheng, Xun Luo, Mark J. Jackson 311 -- Chapter 12 Nanocrystalline Diamond: Deposition Routes and Applications / Nasar Ali, Juan Gracio, Mark J. Jackson, Waqar Ahmed 339 -- Chapter 13 Commercialization Issues of Micro-Nano Technology / David W.L. Tolfree 359 -- Chapter 14 The Future of Micro- and Nanomanufacturing / Mark J. Jackson 367.
- ISBN
- 0824724313 (Hardcover)
- 9780824724313
- LCCN
- ^^2005049275
- 9780824724313
- OCLC
- 60664422
- Owning Institutions
- Harvard Library