Research Catalog

Sputtering by particle bombardment : experiments and computer calculations from threshold to MeV energies / Rainer Behrisch, Wolfgang Eckstein (eds.).

Title
Sputtering by particle bombardment : experiments and computer calculations from threshold to MeV energies / Rainer Behrisch, Wolfgang Eckstein (eds.).
Publication
Berlin ; New York : Springer, c2007.

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Additional Authors
  • Behrisch, Rainer.
  • Eckstein, Wolfgang.
Description
xvii, 507 p. : ill. (some col.); 21 cm.
Series Statement
Topics in applied physics ; 110
Uniform Title
  • Topics in applied physics 110.
  • Topics in applied physics ; v. 110.
Alternative Title
Experiments and computer calculations from threshold to MeV energies
Subject
  • Atoms and Molecules in Strong Fields, Plasma Physics
  • Chemistry
  • Ions
  • Plasma (Ionized gases)
  • Spectrometry, Mass, Fast Atom Bombardment
  • Sputtering (Physics)
  • Surfaces (Physics)
  • Surfaces and Interfaces, Thin Films
Bibliography (note)
  • Includes bibliographical references and index.
Contents
Introduction and overview / Rainer Behrisch and Wolfgang Eckstein -- Computer simulation of the sputtering process / Wolfgang Eckstein and Herbert M. Urbassek -- Sputtering yields / Wolfgang Eckstein -- Results of molecular dynamics calculations / Herbert M. Urbassek -- Energy and angular distributions of sputtered species / Hubert Gnaser -- Chemical sputtering / Wolfgang Jacob and Joachim Roth -- Electronic sputtering with swift heavy ions / Walter Assmann, Marcel Toulemonde, and Christina Trautmann.
ISBN
  • 9783540445005
  • 3540445005
LCCN
^^2007920813
OCLC
144222189
Owning Institutions
Harvard Library