Research Catalog
Advanced interconnects and chemical mechanical planarization for micro- and nanoelectronics : Symposium held April 5-9, 2010, San Francisco, California / editors, Johann W. Bartha ... [et al.].
- Title
- Advanced interconnects and chemical mechanical planarization for micro- and nanoelectronics : Symposium held April 5-9, 2010, San Francisco, California / editors, Johann W. Bartha ... [et al.].
- Author
- Symposium E, "Chemical Mechanical Planarization as a Semiconductor Technology Enabler" (2010 : San Francisco, Calif.)
- Publication
- Warrendale, Pa. : Materials Research Society, c2010
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TK7874.84 .S967 2010 | Off-site |
Details
- Additional Authors
- Description
- xiv, 342 p. : ill.; 24 cm.
- Series Statement
- Materials Research Society symposium proceedings ; v. 1249
- Uniform Title
- Materials Research Society symposia proceedings ; v. 1249.
- Subject
- Genre/Form
- Conference papers and proceedings
- Note
- "Symposium E, 'Chemical Mechanical Planarization as a Semiconductor Technology Enabler--2010,' held April 5-9 at the 2010 MRS Spring Meeting in San Francisco, California ..."--Pref.
- Bibliography (note)
- Includes bibliographical references and indexes.
- Processing Action (note)
- committed to retain
- ISBN
- 1605112267
- 9781605112268
- OCLC
- 671870229
- Owning Institutions
- Harvard Library