Research Catalog
Atomic layer deposition and direct-liquid-injection chemical vapor deposition of nickel nitride films and their conversion to nickel silicide films / by Zhefeng Li.
- Title
- Atomic layer deposition and direct-liquid-injection chemical vapor deposition of nickel nitride films and their conversion to nickel silicide films / by Zhefeng Li.
- Author
- Li, Zhefeng.
- Publication
- 2011.
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- Description
- viii, 107 leaves : ill.; 28 cm.
- Subject
- Note
- Thesis advisor: Professor Roy G. Gordon.
- "May, 2011."
- Thesis (note)
- Thesis (Ph. D.)--Harvard University, 2011.
- Bibliography (note)
- Includes bibliographical references (leaves 105-107).
- Processing Action (note)
- committed to retain
- Owning Institutions
- Harvard Library