Research Catalog

Advanced metallization for ULSI applications in 1994 : proceedings of the conference held October 4-6, 1994 in Austin, Texas, U.S.A. / editors, Roc Blumenthal, Guido Janssen.

Title
Advanced metallization for ULSI applications in 1994 : proceedings of the conference held October 4-6, 1994 in Austin, Texas, U.S.A. / editors, Roc Blumenthal, Guido Janssen.
Author
Advanced Metallization for ULSI Applications Conference (1994 : Austin, Tex.)
Publication
Pittsburgh, Pa. : Materials Research Society, c1995.

Holdings

Details

Additional Authors
  • Blumenthal, Roc.
  • Janssen, Guido.
  • University of California, Berkeley. Continuing Education in Engineering.
Description
xv, 564 p. : ill.; 24 cm.
Series Statement
Materials Research Society conference proceedings, 1048-0854
Uniform Title
Materials Research Society conference proceedings.
Subject
  • Electrochemical metallizing > Congresses
  • Integrated circuits > Congresses
  • Vapor-plating > Congresses
Note
  • "Papers presented at the Advanced Metallization for ULSI Application Conference"--Pref.
  • "Sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California U.S.A."
Processing Action (note)
  • committed to retain
ISBN
1558992790
LCCN
^^^95004971^