Research Catalog

Advanced metallization and interconnect systems for ULSI applications in 1995 : proceedings of the conference held October 3-5, 1995 in Portland, Oregon, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, U.S.A., a parallel session of the conference was held from October 24- 25, 1995 in Tokyo, Japan / editors, Russell C. Ellwanger, Shi-Qing Wang.

Title
Advanced metallization and interconnect systems for ULSI applications in 1995 : proceedings of the conference held October 3-5, 1995 in Portland, Oregon, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, U.S.A., a parallel session of the conference was held from October 24- 25, 1995 in Tokyo, Japan / editors, Russell C. Ellwanger, Shi-Qing Wang.
Publication
Pittsburgh, Pa. : Materials Research Society, c1996.

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Details

Additional Authors
  • Ellwanger, Russell C.
  • University of California, Berkeley. Continuing Education in Engineering.
  • Wang, Shi-Qing.
Description
xix, 767 p. : ill.; 24 cm.
Series Statement
Conference proceedings, 1048-0854
Uniform Title
Materials Research Society conference proceedings.
Subject
  • Dielectrics > Congresses
  • Electrochemical metallizing > Congresses
  • Integrated circuits > Congresses
  • Titanium nitride > Congresses
  • Vapor-plating > Congresses
Bibliography (note)
  • Includes bibliographical references and indexes.
Processing Action (note)
  • committed to retain
ISBN
155899341X
LCCN
^^^96209712^
OCLC
35636319
Owning Institutions
Harvard Library