Research Catalog

Microelectronic manufacturing yield, reliability, and failure analysis : 25-26 October 1995, Austin, Texas /

Title
Microelectronic manufacturing yield, reliability, and failure analysis : 25-26 October 1995, Austin, Texas / Gopal Rao, Massimo Piccoli, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International.
Publication
Bellingham, Wash. : SPIE, c1995.

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Details

Additional Authors
  • Piccoli, Massimo.
  • Rao, Gopal.
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
Description
vii, 284 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 2635
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2635.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819420018
LCCN
95070378
Owning Institutions
Princeton University Library