Research Catalog

Microlithography and metrology in micromachining : 23-24 October 1995, Austin, Texas /

Title
Microlithography and metrology in micromachining : 23-24 October 1995, Austin, Texas / Michael T. Postek, chair/editor ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash. : SPIE, c1995.

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Details

Additional Authors
  • National Institute of Standards and Technology (U.S.) http://id.loc.gov/authorities/names/n88112126
  • Postek, Michael T.
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
Description
ix, 246 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 2640
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2640.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819420069
LCCN
95070375
Owning Institutions
Princeton University Library