Research Catalog

Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas /

Title
Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas / John Lowell, Ray T. Chen, Jagdish P. Mathur, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organization SEMI--Semiconductor Equipment and Materials International.
Publication
Bellingham, Wash., USA : SPIE, c1995.

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Details

Additional Authors
  • Chen, Ray T.
  • Lowell, John.
  • Mathur, Jagdish P.
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
Description
ix, 302 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 2638
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2638.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819420042
LCCN
95070381
Owning Institutions
Princeton University Library