Research Catalog

Micromachining and microfabrication process technology : 23-24 October, 1995 Austin, Texas /

Title
Micromachining and microfabrication process technology : 23-24 October, 1995 Austin, Texas / Karen W. Markus, chair/editor ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--The International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE, c1995.

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Details

Additional Authors
  • Markus, Karen W.
  • National Institute of Standards and Technology (U.S.) http://id.loc.gov/authorities/names/n88112126
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
Description
vii, 336 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 2639
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2639.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819420050
LCCN
95070374
Owning Institutions
Princeton University Library