Research Catalog

Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October, 1995, Austin, Texas /

Title
Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October, 1995, Austin, Texas / Anant G. Sabnis, Ivo J. Raaijmakers, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International.
Publication
Bellingham, Wash., USA : SPIE, c1995.

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Details

Additional Authors
  • Raaijmakers, Ivo J.
  • Sabnis, Anant G.
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
Description
vii, 238 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 2637
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2637.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819420034
LCCN
95070380
Owning Institutions
Princeton University Library