Research Catalog

Micromachined devices and components : 23-24 October, 1995, Austin, Texas /

Title
Micromachined devices and components : 23-24 October, 1995, Austin, Texas / Ray Roop, Kevin Chau, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--The International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE, c1995.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
Not available - Please for assistance.
TextUse in library TK7874 .M538 1995Off-site

Details

Additional Authors
  • Chau, Kevin.
  • National Institute of Standards and Technology (U.S.) http://id.loc.gov/authorities/names/n88112126
  • Roop, Ray.
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
Description
ix, 296 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 2642
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2642.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819420085
LCCN
95070377
Owning Institutions
Princeton University Library