Research Catalog

IEEE/UCS/SEMI International Symposium on Semiconductor Manufacturing : [proceedings] /

Title
IEEE/UCS/SEMI International Symposium on Semiconductor Manufacturing : [proceedings] / sponsored by the IEEE Electron Devices Society, and the Components Packaging & Manufacturing Technology Society and the Ultra Clean Society.
Author
International Symposium on Semiconductor Manufacturing (1995: Austin, Tex.)
Publication
[New York, N.Y.] : Institute of Electrical and Electronics Engineers ; Piscataway, NJ : Additional copies may be purchased from IEEE Service Center, c1995.

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Details

Additional Authors
  • Components, Packaging & Manufacturing Technology Society. http://id.loc.gov/authorities/names/nr94012200
  • IEEE Electron Devices Society. http://id.loc.gov/authorities/names/n81070856
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Ultra Clean Society. http://id.loc.gov/authorities/names/no95059544
Description
ix, 294 p. : ill.; 28 cm.
Alternative Title
  • 1995 IEEE International Symposium on Semiconductor Manufacturing
  • 1995 International Symposium on Semiconductor Manufacturing
  • ISSM '95
Subjects
Note
  • "IEEE catalog number 95CH35841"--T.p. verso.
  • "ISSM '95."
ISBN
  • 0780329287 (softbound ed.)
  • 0780329295 (casebound ed.)
  • 0780329309 (microfiche ed.)
LCCN
95078629
Owning Institutions
Princeton University Library