Research Catalog

IEEE/SEMI 1995 Advanced Semiconductor Manufacturing Conference and Workshop : theme--semiconductor manufacturing: economic solutions for the 21st century : ASMC 95 proceedings, November 13-15, 1995, Cambridge, Massachusetts.

Title
IEEE/SEMI 1995 Advanced Semiconductor Manufacturing Conference and Workshop : theme--semiconductor manufacturing: economic solutions for the 21st century : ASMC 95 proceedings, November 13-15, 1995, Cambridge, Massachusetts.
Author
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (6th : 1995 : Cambridge, Mass.)
Publication
New York : IEEE, c1995.

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Details

Additional Authors
  • Institute of Electrical and Electronics Engineers. http://id.loc.gov/authorities/names/n79053217
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
Description
vi, 391 p. : ill.; 28 cm.
Alternative Title
  • 1995 Advanced Semiconductor Manufacturing Conference and Workshop
  • 1995 IEEE/SEMI Advanced Semiconductor Manufacturing Conference & Workshop
  • ASMC 95 proceedings
  • Semiconductor manufacturing: economic solutions for the 21st century
Subjects
Note
  • "IEEE catalog number 95CH35811"--T.p. verso.
Bibliography (note)
  • Includes bibliographical references.
Additional Formats (note)
  • Also available in an electronic version.
ISBN
  • 0780327136 (softbound ed.)
  • 0780327144 (casebound ed.)
  • 0780327152 (microfiche ed.)
Owning Institutions
Princeton University Library