Research Catalog

Advances in resist technology and processing XIII : 11-13 March 1996, Santa Clara, California /

Title
Advances in resist technology and processing XIII : 11-13 March 1996, Santa Clara, California / Roderick R. Kunz, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH.
Publication
Bellingham, Wash., USA : International Society for Optical Engineering, c1996.

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Details

Additional Authors
  • Kunz, Roderick R.
  • SEMATECH (Organization) http://id.loc.gov/authorities/names/nr91015579
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumention Engineers.
Description
xi, 774 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 2724
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2724.
Subject
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819421006
LCCN
91061057
Owning Institutions
Princeton University Library