Research Catalog

Microelectronic device and multilevel interconnection technology II : 16-17 October, 1996, Austin, Texas /

Title
Microelectronic device and multilevel interconnection technology II : 16-17 October, 1996, Austin, Texas / Ih-Chin Chen ... [et al.], chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].
Publication
Bellingham, Wash., USA : SPIE, c1996.

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Details

Additional Authors
  • Chen, Ih-Chin.
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
Description
viii, 392 p. : ill. (some col.); 28 cm.
Series Statement
SPIE proceedings series ; v. 2875
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2875.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819422738
LCCN
96069470
Owning Institutions
Princeton University Library