Research Catalog

Microlithography and metrology in micromachining II : 14-15 October 1996, Austin, Texas /

Title
Microlithography and metrology in micromachining II : 14-15 October 1996, Austin, Texas / Michael T. Postek, Craig Friedrich, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology.
Publication
Bellingham, Wash. : SPIE, c1996.

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Details

Additional Authors
  • Friedrich, Craig.
  • National Institute of Standards and Technology (U.S.) http://id.loc.gov/authorities/names/n88112126
  • Postek, Michael T.
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
Description
ix, 296 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 2880
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2880.
Subjects
Note
  • "Cooperating organizations: Solid State Technology, Sandia National Laboratories".
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819422789
LCCN
96069474
Owning Institutions
Princeton University Library