Research Catalog

Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas /

Title
Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas / Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International ... [et al.].
Publication
Bellingham, Wash., USA : SPIE, c1996.

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Details

Additional Authors
  • Chen, Ray T.
  • DeBusk, Damon.
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
Description
ix, 218 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 2877
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2877.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819422754
LCCN
96069472
Owning Institutions
Princeton University Library