Research Catalog

Microelectronic manufacturing yield, reliability, and failure analysis II : 16-17 October 1996, Austin, Texas /

Title
Microelectronic manufacturing yield, reliability, and failure analysis II : 16-17 October 1996, Austin, Texas / Ali Keshavarzi, Sharad Prasad, Hans-Dieter Hartmann, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International ... [et al.].
Publication
Bellingham, Wash. : SPIE, c1996.

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Details

Additional Authors
  • Ali Keshavarzi.
  • Hartmann, Hans-Dieter.
  • Prasad, Sharad.
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
Description
ix, 372 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 2874
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2874.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
081942272X
LCCN
96069469
Owning Institutions
Princeton University Library