Research Catalog

Micromachining and microfabrication process technology II : 14-15 October, 1996 Austin, Texas /

Title
Micromachining and microfabrication process technology II : 14-15 October, 1996 Austin, Texas / Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations Solid State Technology, Sandia National Laboratories.
Publication
Bellingham, Wash., USA : SPIE, c1996.

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Details

Additional Authors
  • Chang, Shih-Chia.
  • National Institute of Standards and Technology (U.S.) http://id.loc.gov/authorities/names/n88112126
  • Pang, Stella W.
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
Description
ix, 366 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 2879
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2879.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819422770
LCCN
96069473
Owning Institutions
Princeton University Library