Research Catalog

Microelectronic structures and MEMS for optical processing II : 14-15 October, 1996, Austin, Texas /

Title
Microelectronic structures and MEMS for optical processing II : 14-15 October, 1996, Austin, Texas / M. Edward Motamedi, Wayne Bailey, chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology.
Publication
Bellingham, Wash., USA : SPIE, c1996.

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Details

Additional Authors
  • Bailey, Wayne E.
  • Motamedi, M. Edward.
  • National Institute of Standards and Technology (U.S.) http://id.loc.gov/authorities/names/n88112126
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
Description
v, 220 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 2881
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2881.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819422797
LCCN
96069475
Owning Institutions
Princeton University Library