Research Catalog

IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop : theme--innovative approaches to growth in the semi-conductor industry : ASMC 96 proceedings, November 12-14, 1996, Cambridge, Massachusetts.

Title
IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop : theme--innovative approaches to growth in the semi-conductor industry : ASMC 96 proceedings, November 12-14, 1996, Cambridge, Massachusetts.
Author
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (7th : 1996 : Cambridge, Mass.)
Publication
Piscataway, NJ : IEEE Service Center ; Mountain View, CA : SEMI, c1996.

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Details

Additional Authors
  • Institute of Electrical and Electronics Engineers. http://id.loc.gov/authorities/names/n79053217
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
Description
vi, 479 p. : ill.; 28 cm.
Alternative Title
  • 1996 Advanced Semiconductor Manufacturing Conference and Workshop
  • 1996 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
  • ASMC 96 proceedings
  • Innovative approaches to growth in the semi-conductor industry
Subjects
Note
  • "IEEE catalog number 96CH35953"--T.p. verso.
Bibliography (note)
  • Includes bibliographical references.
Additional Formats (note)
  • Also available in an electronic version.
ISBN
  • 0780333713 (softbound)
  • 0780333721 (casebound)
Owning Institutions
Princeton University Library