Research Catalog

16th Annual Symposium on Photomask Technology and Management : proceedings : 20-22 September, 1996, Redwood City, California /

Title
16th Annual Symposium on Photomask Technology and Management : proceedings : 20-22 September, 1996, Redwood City, California / Gilbert V. Shelden, James A Reynolds, chairs/editors; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology.
Author
Symposium on Photomask Technology and Management (16th : 1996 : Redwood City, Calif.)
Publication
Bellingham, Wash. : SPIE, c1996.

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Details

Additional Authors
  • BACUS (Technical group) http://id.loc.gov/authorities/names/n92089299
  • Reynolds, James A., 1930-
  • SPIE--the International Society for Optical Engineering. http://id.loc.gov/authorities/names/n78088934
  • Shelden, Gilbert V.
Description
x, 586 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 2884
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2884.
Subjects
Bibliography (note)
  • Includes bibliographic references and index.
ISBN
0819422827
LCCN
96069366
Owning Institutions
Princeton University Library