Research Catalog
16th Annual Symposium on Photomask Technology and Management : proceedings : 20-22 September, 1996, Redwood City, California /
- Title
- 16th Annual Symposium on Photomask Technology and Management : proceedings : 20-22 September, 1996, Redwood City, California / Gilbert V. Shelden, James A Reynolds, chairs/editors; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology.
- Author
- Symposium on Photomask Technology and Management (16th : 1996 : Redwood City, Calif.)
- Publication
- Bellingham, Wash. : SPIE, c1996.
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Details
- Additional Authors
- Description
- x, 586 p. : ill.; 28 cm.
- Series Statement
- SPIE proceedings series ; v. 2884
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 2884.
- Subjects
- Bibliography (note)
- Includes bibliographic references and index.
- ISBN
- 0819422827
- LCCN
- 96069366
- Owning Institutions
- Princeton University Library