Research Catalog

Advances in resist technology and processing XIV : 10-12 March, 1997, Santa Clara, California /

Title
Advances in resist technology and processing XIV : 10-12 March, 1997, Santa Clara, California / Rʹegine G. Tarascon-Auriol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH.
Publication
Bellingham, Wash. : International Society for Optical Engineering, c1997.

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Details

Additional Authors
  • SEMATECH (Organization). http://id.loc.gov/authorities/names/nr91015579
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumention Engineers.
  • Tarascon-Auriol, Rʹegine G.
Description
xv, 1028 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 3049
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3049.
Subject
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819424633
Owning Institutions
Princeton University Library