Research Catalog

Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California /

Title
Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California / David E. Seeger, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering : cooperating organization SEMI--Semiconductor Equipment and Materials International, SEMATECH.
Publication
Bellingham, Wash., USA : SPIE, c1997.

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Details

Additional Authors
  • SEMATECH (Organization) http://id.loc.gov/authorities/names/nr91015579
  • Seeger, David E.
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
Description
ix, 412 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 3048
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3048.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819424625
Owning Institutions
Princeton University Library